ICPT 2014 - 11th international Conference for Planarization/CMP Technology

Authors, interested in planarization/CMP technology are invited to submit contributions for presentations at the ICPT2014 Conference. ICPT2014 will accept two types of presentations: ORAL presentations and POSTER presentations. Authors can select oral or poster presentations at the time of application. All papers submitted for presentations will be reviewed, examined and decided as accepted papers or not, based on the submitted abstracts by the Program Committee. Submitted papers should be original, and have not been previously published in a Journal or presented at a Conference. Students' submissions are also welcome. Please take this great opportunity to exchange research interests among outstanding engineers and scientists in the world.
Subjects of Interest
The topics of ICPT2014 cover all aspects of planarization and CMP technology including the areas of interest listed, but not limited to:
Front end CMPBack end CMPProcess integration and controlEquipment and metrologyDefects and Post CMP cleaningConsumablesReliability issuesCMP fundamentalsModeling and simulation3D ICs/TSV applicationsCMP for MEMSCMP for Green devicesEmerging technologies in CMPCMP alternatives
Abstract submission
Authors should submit an abstract written in English, as an electronic form in MS-Word or PDF format in one page of specified format appeared on the ICPT2014 website (http://www.icpt2014.org/) "Call for Papers and Paper Submission".
Please indicate the preference of oral or poster presentation and assign the main subject listed above when submitting the abstract. Abstract should be submitted as an attached file of e-mail to ICPT2014 abstract-taker (abstract-AT-icpt2014.org). For those authors who cannot download template and who have any question about abstract submission, please contact the Conference Secretariat (info-AT-icpt2014.org). The deadline for abstract submission is May 15, 2014.
Abstracts acceptance will be notified via email by July 15, 2014. Presentation of accepted papers at the ICPT2014 must be in English.