MEMS 2013 - 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
Design, simulation and analysis tools with experimental verification
Fabrication technologies and processes
Silicon and non-silicon materials
Electro-mechanical integration techniques
Assembly and packaging approaches
Metrology and operational evaluation techniques
System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
Mechanical, thermal, and magnetic sensors and actuators, and system
Opto-mechanical microdevices and microsystems
Fluidic microcomponents and microsystems
Microdevices for data storage
Microdevices for biomedical engineering
Micro chemical analysis systems
Microdevices and systems for wireless communication
Microdevices for power supply and energy harvesting
Nano-electro-mechanical devices and systems
Scientific microinstruments