MEMS 2014 - IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Development of micro-electro mechanical systems (MEMS) focusing on design, simulation and analysis tools, fabrication technologies and processes, integration techniques, and assembly and packaging approaches. Application of MEMS in sensors and actuators, microdevices for opto-mechanical systems, fluidic microsystems, biomedical engineering, wireless communication, power supply and energy harvesting and nano-electro-mechanical devices.
MEMS 2014
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