MNC 2010 - 2010 International Microprocesses and Nanotechnology Conferencce (MNC2010)

Microprocesses and Nanotechnology play an important role of technical backbone for constructing the advanced information communications society with ubiquitous net works of the 21st century.
The MNC conference is now in its 23rd year and is intended to provide a forum for discussing lithography science and process technology using photon, electron, ion, other energetic particles and nanomaterials. This conference covers not only their applications to micro-and nano-structure fabrication and related physics and devices, but also their fusion applications with other fields like bio, medical information, and communication technology.

SCOPE
1: Lithography, and Related Technologies
1-1: DUV, EUV Lithography
1-2: Electron- and Ion-Beam Lithography　
1-3: Resist Materials and Processing
2: Nanotechnology
2-0　Nanocarbon
2-1: Nanodevice
2-2: Nanofabrication
2-3: Nanomaterials
2-4: Nano Tool
3: Nanoimprint, Nanoprint and Rising Lithography
4: Bio MEMS, Lab on a Chip
5: Microsystem Technology and MEMS

Symp. A: Cost-Effective Efficient Litho Technologies
- Holding the Keys to "Green Lithography"