This conference, sponsored by the Technical Committee on Micro- and Nano-Systems, will provide researchers in academia and industry a unique forum to exchange technical and scientific information related to current developments and emerging issues in the design, mechanics, control, and manufacturing of micro- and nanoscale systems. The conference will feature keynote and invited speakers, best-paper awards and peer-reviewed technical papers (presented in technical session and/or poster formats) on a wide range of topics. The conference organizing committee solicits papers addressing theoretical and/or applied research in the areas of design, manufacturing, metrology, testing, mechanics, dynamics and control, multi-physics and multi-scale modeling, and performance and reliability of micro- and nanoscale systems or devices. Researchers both within and outside of the traditional bounds of the field of mechanical engineering are encouraged to participate.